Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862514 | Integrated circuit device including air gaps and method of manufacturing the same | Sanghoon Ahn, Woojin Lee | 2024-01-02 |
| 11646263 | Semiconductor device and method of manufacturing semiconductor device | Wookyung You, Kyeongbeom Park, Sungbin Park, Suhyun PARK, Jongmin Baek +3 more | 2023-05-09 |
| 11515201 | Integrated circuit device including air gaps and method of manufacturing the same | Sanghoon Ahn, Woojin Lee | 2022-11-29 |
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Sangki Nam, Soonam Park, Akira Koshiishi | 2021-12-07 |
| 11133249 | Semiconductor device | Yeonggil KIM, Jongmin Baek, Wookyung You | 2021-09-28 |
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Beomjin Yoo, Minhyoung KIM, Wonhyuk Jang, Hoseop Choi, Jeongmin Bang | 2021-05-04 |
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kwangyoub Heo | 2019-12-31 |
| 10381461 | Method of forming a semiconductor device with an injector having first and second outlets | Namjin Cho, Yeontae Kim, Keesoo PARK, Eunsok Choi | 2019-08-13 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kwangyoub Heo | 2019-07-09 |
| 10199325 | Semiconductor device and method of fabricating the same | Taejin Yim, Jongmin Baek, Deokyoung Jung, Byunghee Kim, Jiyoung Kim +2 more | 2019-02-05 |
| 9669423 | Multi-tip spark discharge generator and method for producing nanoparticle structure using same | Man Soo Choi, Kyungyeon Ha, Hoseop Choi, Kinam Jung, Dongjoon Lee +1 more | 2017-06-06 |
| 9349976 | Process for preparing nanoparticle embedded electronic device | Changsoon Kim, Hyungchae Kim, Jongcheon Lee, Hyangki Sung, Kinam Jung +3 more | 2016-05-24 |