Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216406 | Coating method and coating apparatus | Yusaku Hashimoto, Masatoshi Kawakita | 2025-02-04 |
| 11938511 | Coating method, coating apparatus and recording medium | Masatoshi Kawakita, Yusaku Hashimoto | 2024-03-26 |
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Keiichi Tanaka, Yoshihiro Kondo, Makoto Muramatsu, Teruhiko Kodama | 2023-07-04 |
| 11407005 | Coating method, coating apparatus and recording medium | Masatoshi Kawakita, Yusaku Hashimoto | 2022-08-09 |
| 11065639 | Coating treatment method, computer storage medium and coating treatment apparatus | Shogo Inaba, Shinichi Hatakeyama | 2021-07-20 |
| 10666726 | Data processing system, and program for managing data | Jun Tanaka, Ko Shimazawa, Keisuke Tatehara | 2020-05-26 |
| 9846715 | Address/latitude and longitude converting device and geographical information system using the same | Taiyo Kato, Ko Shimazawa | 2017-12-19 |
| 8453599 | Resist solution supply apparatus, resist solution supply method, and computer storage medium | Yusuke Yamamoto | 2013-06-04 |
| 6821550 | Apparatus and method for applying process solution | Masatoshi Deguchi | 2004-11-23 |
| 6620244 | Resist film forming method and resist coating apparatus | — | 2003-09-16 |
| 6410194 | Resist film forming method and resist coating apparatus | — | 2002-06-25 |
| 6281145 | Apparatus and method for applying process solution | Masatoshi Deguchi | 2001-08-28 |
| 6117486 | Photoresist coating method and apparatus | — | 2000-09-12 |
| 6004047 | Method of and apparatus for processing photoresist, method of evaluating photoresist film, and processing apparatus using the evaluation method | Masami Akimoto, Yuji Fukuda | 1999-12-21 |
| 5826130 | Apparatus and method for developing resist coated on substrate | Hideya Tanaka, Norimitsu Morioka | 1998-10-20 |
| 5689749 | Apparatus for developing a resist-coated substrate | Hideya Tanaka, Norimitsu Morioka | 1997-11-18 |