Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5714757 | Surface analyzing method and its apparatus | Naoshi Itabashi, Hiroyasu Shichi, Seiji Yamamoto, Satoshi Osabe, Keiichi Kanehori | 1998-02-03 |
| 5527731 | Surface treating method and apparatus therefor | Seiji Yamamoto | 1996-06-18 |
| 5485497 | Optical element and projection exposure apparatus employing the same | Hiroaki Oizumi, Masaaki Ito, Takashi Soga, Taro Ogawa, Eiji Takeda | 1996-01-16 |
| 5372916 | X-ray exposure method with an X-ray mask comprising phase shifter sidewalls | Taro Ogawa, Seiichi Murayama, Hiroaki Oizumi, Takashi Soga, Seiji Yamamoto +1 more | 1994-12-13 |
| 5305364 | Projection type X-ray lithography apparatus | Hiroaki Oizumi, Shigeo Moriyama, Shinji Okazaki, Tsuneo Terasawa, Masaaki Itou | 1994-04-19 |
| 5177773 | X-ray mask and method for producing same | Hiroaki Oizumi, Shimpei Iijima | 1993-01-05 |
| 5017458 | Method for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerization | Yasunari Soda, Hiroaki Oizumi, Takeshi Kimura | 1991-05-21 |
| 4981771 | Pattern fabricating method | Yasunari Soda, Takeshi Kimura | 1991-01-01 |
| 4960676 | Method for forming pattern by using graft copolymerization | Hiroaki Oizumi, Yasunari Soda, Takeshi Kimura | 1990-10-02 |
| 4954424 | Pattern fabrication by radiation-induced graft copolymerization | Hiroaki Oizumi, Yasunari Soda, Taro Ogawa, Takeshi Kimura | 1990-09-04 |
| 4788698 | X-ray exposure system | Takeshi Kimura, Shojiro Asai, Hidehito Obayashi | 1988-11-29 |
| 4719161 | Mask for X-ray lithography and process for producing the same | Takeshi Kimura, Hiroshi Okamoto, Takao Iwayanagi, Tetsuichi Kudo, Shinji Kuniyoshi | 1988-01-12 |
| 4701940 | Linearly polarized X-ray patterning process | Yasunari Soda, Takeshi Kimura, Hidehito Obayashyi | 1987-10-20 |
| 4670650 | Method of measuring resist pattern | Toshiharu Matsuzawa | 1987-06-02 |
| 4599737 | X-ray mask with Ni pattern | Takeshi Kimura, Hidehito Obayashi | 1986-07-08 |
| 4514857 | X-Ray lithographic system | Takashi Kimura, Hidehito Obayashi | 1985-04-30 |
| 4403151 | Method of forming patterns | Yozi Maruyama, Shinji Okazaki, Fumio Murai | 1983-09-06 |
| 4315984 | Method of producing a semiconductor device | Shinji Okazaki, Susumu Takahashi, Fumio Murai | 1982-02-16 |
| 4307176 | Method of forming a pattern | Shinji Okazaki, Shojiro Asai | 1981-12-22 |