Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4904569 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka, Toshiei Kurosaki, Saburo Nonogaki +1 more | 1990-02-27 |
| 4670650 | Method of measuring resist pattern | Kozo Mochiji | 1987-06-02 |
| 4614706 | Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching | Takao Iwayanagi, Kikuo Douta, Hiroshi Yanazawa, Takahiro Kohashi, Saburo Nonogaki | 1986-09-30 |
| 4536421 | Method of forming a microscopic pattern | Kikuo Douta, Takao Iwayanagi, Hiroshi Yanazawa | 1985-08-20 |