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Ka Wing Cheng, Yau Chuen YIU, Chun Hong SHAM, Juan CHENG, Koon Chung HUI |
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Diamond clarity measurement process and system |
Ka Wing Cheng, Kin Wing Wong, Juan CHENG, Wing Chi TANG, Koon Chung HUI |
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Plasma-enhanced anneal chamber for wafer outgassing |
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Diamond clarity measurement process and system |
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Plasma-enhanced anneal chamber for wafer outgassing |
Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Dongming Iu |
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Showerhead for a semiconductor processing chamber |
Lara Hawrylchak, Aaron Miller |
2017-06-20 |