Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312688 | Precursors and related methods | MinSeok Ryu, Sangjin Lee, SeongCheol Kim, YeRim Yeon, Yoonhae Kim | 2025-05-27 |
| 9938622 | Method to deposit CVD ruthenium | Tae Hong Ha, Sang Ho Yu | 2018-04-10 |
| 9169556 | Tungsten growth modulation by controlling surface composition | Kai Wu, Sang Ho Yu, Sang-Hyeob Lee, Kazuya Daito, Joshua Collins +1 more | 2015-10-27 |
| 8900999 | Low temperature high pressure high H2/WF6 ratio W process for 3D NAND application | Kai Wu, Sang-Hyeob Lee, Joshua Collins | 2014-12-02 |
| 8431033 | High density plasma etchback process for advanced metallization applications | Chunming Zhou, Liqi Wu, Karthik S. Colinjivadi, Emery Kuo, Huatan Qiu | 2013-04-30 |