Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12264396 | Substrate processing method | Takashi Nakazawa, Isamu Miyamoto, Kenji Nakamizo | 2025-04-01 |
| 11905603 | Substrate processing method and substrate processing apparatus | Takashi Nakazawa, Isamu Miyamoto, Kenji Nakamizo | 2024-02-20 |
| 11353894 | Liquid processing apparatus and liquid processing method | Hiroshi Komiya, Kouji Ogura | 2022-06-07 |
| 11135698 | Processing apparatus, processing method, and storage medium | Kenji Nakamizo, Yuichi Douki | 2021-10-05 |
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Kouji Takuma, Chikara Nobukuni, Shinji Sugahara +1 more | 2021-06-22 |
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Chikara Nobukuni, Atsushi Anamoto | 2020-03-17 |
| 10261521 | Processing apparatus, processing method, and storage medium | Kenji Nakamizo, Yuichi Douki, Takuro Masuzumi | 2019-04-16 |
| 10162371 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Chikara Nobukuni, Atsushi Anamoto | 2018-12-25 |
| 8622073 | Apparatus and method for controlling flow rate of liquid, and storage medium | — | 2014-01-07 |
| 8409359 | Substrate processing apparatus, substrate processing method and storage medium | — | 2013-04-02 |
| 8104948 | Processing liquid mixing apparatus and method, substrate processing apparatus, and storage medium | — | 2012-01-31 |
| 7086410 | Substrate processing apparatus and substrate processing method | Yasuhiro Chouno, Norihiro Ito, Tadashi Iino | 2006-08-08 |