Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9178006 | Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications | Xiangxin Rui, Hanhong Chen, Naonori Fujiwara, Imran Hashim | 2015-11-03 |
| 8880216 | Picking system | Tetsuro Izumi, Kenji Matsukuma, Yukio Hashiguchi | 2014-11-04 |
| 8880217 | Picking system | Tetsuro Izumi, Kenji Matsukuma, Yukio Hashiguchi | 2014-11-04 |
| 8606400 | Robot system | Tetsuro Izumi, Kenji Matsukuma, Yukio Hashiguchi | 2013-12-10 |
| 8574998 | Leakage reduction in DRAM MIM capacitors | Sandra G. Malhotra, Hiroyuki Ode, Xiangxin Rui, Takashi Arao, Naonori Fujiwara | 2013-11-05 |
| 8546236 | High performance dielectric stack for DRAM capacitor | Sandra G. Malhotra, Hanhong Chen, Wim Deweerd, Mitsuhiro Horikawa, Hiroyuki Ode +1 more | 2013-10-01 |
| 8541283 | High performance dielectric stack for DRAM capacitor | Sandra G. Malhotra, Hanhong Chen, Wim Deweerd, Mitsuhiro Horikawa, Hiroyuki Ode +1 more | 2013-09-24 |
| 8476141 | High performance dielectric stack for DRAM capacitor | Sandra G. Malhotra, Hanhong Chen, Wim Deweerd, Mitsuhiro Horikawa, Hiroyuki Ode +1 more | 2013-07-02 |
| 8415227 | High performance dielectric stack for DRAM capacitor | Sandra G. Malhotra, Wim Deweerd, Hanhong Chen, Xiangxin Rui, Hiroyuki Ode +1 more | 2013-04-09 |
| 8277891 | Method for suppressing particle generation during semiconductor manufacturing | Yuichiro Morozumi, Takashi Arao, Kazunori Une | 2012-10-02 |
| 7771535 | Semiconductor manufacturing apparatus | — | 2010-08-10 |
| 7763500 | Method for manufacturing semiconductor storage device comprising a slow cooling step | Takashi Arao, Kenji Komeda, Naruhiko Nakanishi, Hideki Gomi | 2010-07-27 |
| 7741173 | Method for forming a metal oxide film | Hiroshi Sakuma | 2010-06-22 |
| 7576016 | Process for manufacturing semiconductor device | Takashi Arao | 2009-08-18 |
| 7303973 | ALD process for capacitor dielectric | Hiroshi Sakuma | 2007-12-04 |
| 7256144 | Method for forming a metal oxide film | Hiroshi Sakuma | 2007-08-14 |
| 7224016 | Memory with memory cells that include a MIM type capacitor with a lower electrode made for reduced resistance at an interface with a metal film | Yoshitaka Nakamura, Hidekazu Goto, Isamu Asano, Mitsuhiro Horikawa, Keiji Kuroki +2 more | 2007-05-29 |
| 6939760 | Method for semiconductor device manufacturing to include multistage chemical vapor deposition of material oxide film | Hirofumi Fujioka, Hiroyuki Kitamura | 2005-09-06 |
| 6509200 | Method of appraising a dielectric film, method of calibrating temperature of a heat treatment device, and method of fabricating a semiconductor memory device | — | 2003-01-21 |
| 6346302 | High density plasma enhanced chemical vapor deposition method | Koji Kishimoto | 2002-02-12 |
| 6191002 | Method of forming trench isolation structure | — | 2001-02-20 |
| 6187693 | Heat treatment of a tantalum oxide film | — | 2001-02-13 |
| 6033990 | Method for manufacturing a multilevel interconnection structure | Koji Kishimoto | 2000-03-07 |
| 6005291 | Semiconductor device and process for production thereof | Kunihiro Fujii, Tatsuya Usami, Koji Kishimoto | 1999-12-21 |
| 5891234 | Spin on glass material and method for forming a semiconductor device by using improved spin on glass material | Koji Kishimoto, Tetsuya Homma | 1999-04-06 |