Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203021 | Substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Koji Kagawa, Kenji Sekiguchi | 2025-01-21 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Koji Kagawa, Kenji Sekiguchi | 2022-04-19 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Takami Satoh, Takashi Uno +3 more | 2018-09-04 |
| 6573031 | Apparatus and method of thermal processing and method of pattern formation | Hiroshi Shinya, Kazuhisa Hayashida, Eiichi Sekimoto | 2003-06-03 |