Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7295314 | Metrology/inspection positioning system | Blaine R. Spady, Robert Buchanan, Richard A. Yarussi | 2007-11-13 |
| 7289215 | Image control in a metrology/inspection positioning system | Blaine R. Spady, Robert Buchanan, Richard A. Yarussi | 2007-10-30 |
| 7230705 | Alignment target with designed in offset | Weidong Yang, Roger R. Lowe-Webb, Guonguang Li | 2007-06-12 |
| 7046361 | Positioning two elements using an alignment target with a designed offset | Weidong Yang, Roger R. Lowe-Webb | 2006-05-16 |
| 6992764 | Measuring an alignment target with a single polarization state | Weidong Yang, Roger R. Lowe-Webb, Silvio J. Rabello | 2006-01-31 |
| 6982793 | Method and apparatus for using an alignment target with designed in offset | Weidong Yang, Roger R. Lowe-Webb, Guoguang Li | 2006-01-03 |
| 6970255 | Encoder measurement based on layer thickness | Blaine R. Spady, Weidong Yang, Roger R. Lowe-Webb | 2005-11-29 |
| 6958819 | Encoder with an alignment target | Weidong Yang, Roger R. Lowe-Webb | 2005-10-25 |
| 6910847 | Precision polar coordinate stage | Christopher W. Blaufus, Blaine R. Spady, Dan M. Colban | 2005-06-28 |
| 6713753 | Combination of normal and oblique incidence polarimetry for the characterization of gratings | Pablo I. Rovira, Guorong V. Zhuang | 2004-03-30 |
| 6108077 | Sample support with a non-reflecting sample supporting surface | Duane C. Holmes | 2000-08-22 |