Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068180 | Advanced temperature monitoring system and methods for semiconductor manufacture productivity | Xuesong Lu, Lin Zhang, Joseph C. Werner, Balaji Pasupathy, Michael W. Johnson | 2024-08-20 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Joseph C. Werner, Nitin Khurana +4 more | 2023-12-05 |
| 10883932 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Patrick L. Smith +2 more | 2021-01-05 |
| 10655223 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Andrew V. LE | 2020-05-19 |
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Patrick L. Smith +2 more | 2019-07-30 |
| 10208380 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Andrew V. LE | 2019-02-19 |
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Xuesong Lu, Andrew V. LE, Xinhai Han | 2018-06-19 |
| 7204888 | Lift pin assembly for substrate processing | Toan Q. Tran, Daniel S. Herkalo, Yen-Kun Wang, Jin Ho Lee, Dong-Hyung LEE +1 more | 2007-04-17 |