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Safety restraint anchor system |
— |
2017-04-11 |
| 7042645 |
Micro-lens array and method of making micro-lens array |
Francis Houlihan, Madanagopal Kunnavakkam, Omkaram Nalamasu |
2006-05-09 |
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Micro-electro-mechanical system device and method of making same |
Raymond A. Cirelli, Michael P. Schlax |
2005-06-14 |
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Micro-lens array and method of making micro-lens array |
Francis Houlihan, Madanagopal Kunnavakkam, Omkaram Nalamasu |
2004-03-02 |
| 6528799 |
Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems |
Victor Katsap, Masis Mkrtchyan, Stuart Stanton |
2003-03-04 |
| 6492647 |
Electron guns for lithography tools |
Victor Katsap, Warren K. Waskiewicz |
2002-12-10 |
| 6400090 |
Electron emitters for lithography tools |
Victor Katsap, Warren K. Waskiewicz |
2002-06-04 |
| 6232040 |
Method of electron beam exposure utilizing emitter with conductive mesh grid |
Victor Katsap, Warren K. Waskiewicz |
2001-05-15 |
| 6177218 |
Lithographic process for device fabrication using electron beam imaging |
Joseph Allen Felker, Stuart Stanton |
2001-01-23 |
| 6051346 |
Process for fabricating a lithographic mask |
Avinoam Kornblit, Anthony E. Novembre |
2000-04-18 |
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Membrane mask for projection lithography |
Anthony E. Novembre, Gary Robert Weber |
1999-11-16 |
| 5701014 |
Projection lithography apparatus |
Steven Berger, George Patrick Watson |
1997-12-23 |
| 5561008 |
Process for device fabrication using projection lithography and an apparatus therefor |
Steven Berger, George Patrick Watson |
1996-10-01 |
| 5500312 |
Masks with low stress multilayer films and a process for controlling the stress of multilayer films |
Lloyd R. Harriott, Cynthia A. Volkert, Warren K. Waskiewicz, David L. Windt |
1996-03-19 |
| 5316879 |
Sub-micron device fabrication using multiple aperture filter |
Steven Berger |
1994-05-31 |
| 5279925 |
Projection electron lithographic procedure |
Steven Berger |
1994-01-18 |
| 5260151 |
Device manufacture involving step-and-scan delineation |
Steven Berger, Marvin Leventhal |
1993-11-09 |