Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431349 | In-situ control of film properties during atomic layer deposition | Douglas Walter Agnew, Joseph R. Abel, Purushottam Kumar, Awnish Gupta | 2025-09-30 |
| 12417943 | Reducing intralevel capacitance in semiconductor devices | Joseph R. Abel, Bart J. van Schravendijk, Douglas Walter Agnew, Dustin Zachary Austin, Awnish Gupta | 2025-09-16 |
| 12252782 | In-situ PECVD cap layer | Jeremy David Fields, Joseph R. Abel, Frank L. Pasquale, Douglas Walter Agnew | 2025-03-18 |
| 12157945 | Thermal atomic layer deposition of silicon-containing films | Awnish Gupta, Tengfei Miao, Adrien LaVoie, Douglas Walter Agnew | 2024-12-03 |
| 12020923 | Low-κ ALD gap-fill methods and material | Joseph R. Abel, Douglas Walter Agnew, Adrien LaVoie, Purushottam Kumar | 2024-06-25 |