Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9099349 | Semiconductor device manufacturing method | Naoyuki Kofuji, Nobuyuki Negishi | 2015-08-04 |
| 9018075 | Plasma processing method | Toru Ito, Akito Kouchi, Hayato Watanabe | 2015-04-28 |
| 8486291 | Plasma processing method | Takeshi Ohmori, Yasuhiro Nishimori, Hitoshi Kobayashi, Masamichi Sakaguchi | 2013-07-16 |
| 8207066 | Dry etching method | Yoshiharu Inoue, Hitoshi Kobayashi, Masunori Ishihara, Toru Ito, Toshiaki Nishida | 2012-06-26 |
| 7224568 | Plasma processing method and plasma processing apparatus | Ken Yoshioka, Takahiro Abe, Go Saito, Motohiko Yoshigai | 2007-05-29 |
| 7098138 | Plasma processing method for working the surface of semiconductor devices | Takao Arase, Motohiko Yoshigai, Go Saito, Masamichi Sakaguchi, Takahiro Shimomura | 2006-08-29 |
| 6709984 | Method for manufacturing semiconductor device | Go Saito, Yutaka Kudoh, Masamichi Sakaguchi, Kazuo Takata | 2004-03-23 |
| 6617255 | Plasma processing method for working the surface of semiconductor devices | Takao Arase, Motohiko Yoshigai, Go Saito, Masamichi Sakaguchi, Takahiro Shimomura | 2003-09-09 |