Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077855 | Cleaning method and film deposition apparatus | Akihiro Kuribayashi, Noriaki Fukiage | 2024-09-03 |
| 11970768 | Film forming method and film forming apparatus | Shimon Otsuki, Takeshi Oyama, Ren MUKOUYAMA, Jun Ogawa, Noriaki Fukiage | 2024-04-30 |
| 11725276 | Plasma purge method | Hyunjoon Bang, Noriaki Fukiage | 2023-08-15 |
| 11414753 | Processing method | Takeshi Oyama, Kentaro Oshimo, Yusuke Suzuki, Jun Ogawa | 2022-08-16 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage, Hiroaki Ikegawa +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Noriaki Fukiage, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Hiroaki Ikegawa | 2021-01-26 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2020-07-14 |
| 10550470 | Film forming apparatus and operation method of film forming apparatus | Kentaro Oshimo, Shimon Otsuki, Takeshi Oyama, Hiroaki Ikegawa, Jun Ogawa | 2020-02-04 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage, Hiroaki Ikegawa +2 more | 2019-10-08 |
| 10344382 | Film forming apparatus | Takahito Umehara, Takehiro Kasama, Tsubasa WATANABE | 2019-07-09 |
| 9388496 | Method for depositing a film on a substrate, and film deposition apparatus | Takahito Umehara | 2016-07-12 |