Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053591 | Multi-port gas injection system and reactor system including same | Mingyang Ma, Junwei Su, Alexandros T. Demos, Xing Lin, Sam Yong Kim | 2021-07-06 |
| 10262859 | Process for forming a film on a substrate using multi-port injection assemblies | Joe Margetis, John Tolle, Nupur Bhargava | 2019-04-16 |
| 9892913 | Radial and thickness control via biased multi-port injection settings | Joe Margetis, John Tolle, Nupur Bhargava | 2018-02-13 |
| 9169975 | Systems and methods for mass flow controller verification | Michael Sarin, Rafael Mendez, Eric Hill, Keith R. Lawson, Andy Rosser | 2015-10-27 |
| 8834955 | Methods and apparatus for a gas panel with constant gas flow | Matthias Bauer | 2014-09-16 |
| 8728239 | Methods and apparatus for a gas panel with constant gas flow | Matthias Bauer | 2014-05-20 |
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2012-01-03 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Matthew G. Goodman, Mark Hawkins, Ravinder Aggarwal, Michael Eugene Givens, Eric Hill | 2011-11-01 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2010-01-19 |