Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Qiwei Liang, Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Shekhar ATHANI | 2024-10-08 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Lancelot HUANG, Alan Tso, Douglas A. Buchberger, Jr., Huixiong Dai +3 more | 2023-03-21 |
| 11555730 | In-situ method and apparatus for measuring fluid resistivity | Douglas A. Buchberger, Jr., Lancelot HUANG | 2023-01-17 |
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Seshadri Ramaswami, Shambhu N. Roy, Niranjan Kumar | 2020-12-29 |