| 9039816 |
Dynamic control of desiccant concentrations in a water recovery device |
Charles Becze, James Ball, David Blatt, Michael J. Flynn, Kean Wing Kin Lam +1 more |
2015-05-26 |
| 9005349 |
Configurable manifolds for water recovery device |
James Ball, Charles Becze, Michael J. Flynn, Richard Teltz, Kean Wing Kin Lam |
2015-04-14 |
| 8864883 |
Surface treatments for dessicant media in a water recovery device |
Charles Becze, James Ball, David Blatt, Michael J. Flynn, Kean Wing Kin Lam +1 more |
2014-10-21 |
| 6663713 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Stuardo Robles, Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Vicente Lam +2 more |
2003-12-16 |
| 6347636 |
Methods and apparatus for gettering fluorine from chamber material surfaces |
Li-Qun Xia, Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh |
2002-02-19 |
| 6162285 |
Ozone enhancement unit |
Quoc Truong |
2000-12-19 |
| 5958510 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Stuardo Robles, Vicente Lim +1 more |
1999-09-28 |
| 5939831 |
Methods and apparatus for pre-stabilized plasma generation for microwave clean applications |
Fong Chang, Long Nguyen |
1999-08-17 |
| 5935334 |
Substrate processing apparatus with bottom-mounted remote plasma system |
Irwin Silvestre |
1999-08-10 |
| 5935340 |
Method and apparatus for gettering fluorine from chamber material surfaces |
Li-Qun Xia, Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh |
1999-08-10 |
| 5902404 |
Resonant chamber applicator for remote plasma source |
Irwin Silvestre, Quoc Truong |
1999-05-11 |
| 5882414 |
Method and apparatus for self-cleaning a blocker plate |
Quoc Truong, Visweswaren Sivaramakrishman |
1999-03-16 |
| 5879574 |
Systems and methods for detecting end of chamber clean in a thermal (non-plasma) process |
Visweswaren Sivaramakrishnan |
1999-03-09 |
| 5812403 |
Methods and apparatus for cleaning surfaces in a substrate processing system |
Li-Qun Xia, Srinivas D. Nemani, Ellie Yieh |
1998-09-22 |
| 5725675 |
Silicon carbide constant voltage gradient gas feedthrough |
Vincente Lim, Visweswaren Sivaramakrishnan |
1998-03-10 |
