| 7972440 |
Monitoring and control of a fabrication process |
John M. McIntosh, Robert Jones |
2011-07-05 |
| 7342225 |
Crystallographic metrology and process control |
Brian Kempshall, Stephen M. Schwarz, Fred Stevie |
2008-03-11 |
| 6899596 |
Chemical mechanical polishing of dual orientation polycrystalline materials |
Michael J. Antonell, Jennifer A. Antonell, Ryan Maynard, Darrell Simpson |
2005-05-31 |
| 6870950 |
Method for detecting defects in a material and a system for accomplishing the same |
Catherine Vartuli, Mike Antonell, Pam Cavanagh, Hui Ma |
2005-03-22 |
| 6825467 |
Apparatus for scanning a crystalline sample and associated methods |
Jennifer Lynn Drown, Kim Elshot, Terri Lynn Shofner, Tingkwan Cheung |
2004-11-30 |
| 6783426 |
Method and apparatus for detection of chemical mechanical planarization endpoint and device planarity |
Jennifer Lynne Drown, Kim Elshot, Tingkwan Cheung |
2004-08-31 |
| 6750447 |
Calibration standard for high resolution electron microscopy |
Catherine Vartuli, John M. McIntosh, Fred Stevie |
2004-06-15 |
| 6727720 |
Probe having a microstylet |
Ryan Maynard, John M. McIntosh, Larry E. Plew, Jeffrey B. Bindell |
2004-04-27 |
| 6714892 |
Three dimensional reconstruction metrology |
John M. McIntosh, Larry E. Plew |
2004-03-30 |
| 6713409 |
Semiconductor manufacturing using modular substrates |
Michael J. Antonell, Nitin M. Patel, Larry E. Plew, Catherine Vartuli |
2004-03-30 |
| 6708574 |
Abnormal photoresist line/space profile detection through signal processing of metrology waveform |
Scott Jessen, John M. McIntosh, Catherine Vartuli, Fred Stevie |
2004-03-23 |
| 6695572 |
Method and apparatus for minimizing semiconductor wafer contamination |
Michael J. Antonell, Larry E. Plew, Catherine Vartuli, Jennifer Juszczak |
2004-02-24 |
| 6651226 |
Process control using three dimensional reconstruction metrology |
John M. McIntosh, Larry E. Plew |
2003-11-18 |
| 6641746 |
Control of semiconductor processing |
John M. McIntosh, Edward Alios Rietman |
2003-11-04 |
| 6633032 |
Mass spectrometer particle counter |
John M. McIntosh, Fred Stevie, Steven Barry Valle, Catherine Vartuli |
2003-10-14 |
| 6627885 |
Method of focused ion beam pattern transfer using a smart dynamic template |
John M. McIntosh, Fred Stevie, Catherine Vartuli, Scott Jessen |
2003-09-30 |
| 6625250 |
Optical structures and methods for x-ray applications |
— |
2003-09-23 |
| 6606371 |
X-ray system |
Michael J. Antonell, John M. McIntosh, Larry E. Plew, Catherine Vartuli |
2003-08-12 |
| 6577970 |
Method of determining a crystallographic quality of a material located on a substrate |
John M. McIntosh, Larry E. Plew, Fred Stevie, Catherine Vartuli |
2003-06-10 |
| 6569690 |
Monitoring system for determining progress in a fabrication activity |
Isik C. Kizilyalli, John M. McIntosh, Fred Stevie, Catherine Vartuli |
2003-05-27 |
| 6534851 |
Modular semiconductor substrates |
Michael J. Antonell, Nitin M. Patel, Larry E. Plew, Catherine Vartuli |
2003-03-18 |
| 6425189 |
Probe tip locator having improved marker arrangement for reduced bit encoding error |
Jeffrey B. Bindell, Larry E. Plew, Frederick A. Stevie |
2002-07-30 |
| 6405584 |
Probe for scanning probe microscopy and related methods |
Jeffrey B. Bindell, Larry E. Plew, Terri Lynn Shofner, Fred Stevie |
2002-06-18 |
| 6265235 |
Method of sectioning of photoresist for shape evaluation |
John M. McIntosh, Brittin Kane, Simon John Molloy, Catherine Vartuli |
2001-07-24 |
| 6250143 |
Method of mapping a surface using a probe for stylus nanoprofilometry having a non-circular cross-section |
Jeffrey B. Bindell, Larry E. Plew, Terri Lynn Shofner, Frederick A. Stevie |
2001-06-26 |