Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277527 | Method of making a twin alternating phase shift mask | Lars Liebmann | 2001-08-21 |
| 6165651 | Apparatus for tuning an attenuating phase shift mask | William J. Adair, Song Peng | 2000-12-26 |
| 6110623 | Surface coating method to highlight transparent mask defects | Denis Rigaill | 2000-08-29 |
| 6110624 | Multiple polarity mask exposure method | Michael S. Hibbs, Timothy E. Neary, Denis Rigaill | 2000-08-29 |
| 6027837 | Method for tuning an attenuating phase shift mask | William J. Adair, Song Peng | 2000-02-22 |
| 5978501 | Adaptive inspection method and system | Karen Badger, Brian J. Grenon, Jacek G. Smolinski | 1999-11-02 |
| 5932377 | Exact transmission balanced alternating phase-shifting mask for photolithography | Richard A. Ferguson, Lars Liebmann, Scott M. Mansfield, Alfred Wong | 1999-08-03 |
| 5807649 | Lithographic patterning method and mask set therefor with light field trim mask | Lars Liebmann, Richard A. Ferguson, William J. Adair | 1998-09-15 |
| 5506080 | Lithographic mask repair and fabrication method | William J. Adair, Willam C. Joyce, James J. Lynch, Jean T. Ohlson | 1996-04-09 |
| 5503951 | Attenuating phase-shift mask structure and fabrication method | Steven Flanders | 1996-04-02 |
| 5484672 | Method of making a rim-type phase-shift mask | Stanislav P. Bajuk, Edward T. Smith | 1996-01-16 |