Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192762 | Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system | Fareen Adeni Khaja | 2019-01-29 |
| 9870937 | High productivity deposition reactor comprising a gas flow chamber having a tapered gas flow space | Mehrdad M. Moslehi, Karl-Josef Kramer, Jay Ashjaee, George D. Kamian, Takao Yonehara | 2018-01-16 |
| 9659769 | Tensile dielectric films using UV curing | Bhadri N. Varadarajan, Sean Chang, James S. Sims, Guangquan Lu, Kevin J. Ilcisin +2 more | 2017-05-23 |
| 8715788 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, Easwar Srinivasan | 2014-05-06 |
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, Easwar Srinivasan | 2011-10-25 |
| 7799705 | Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups | Qingguo Wu, Haiying Fu, David Craig Smith | 2010-09-21 |
| 7781351 | Methods for producing low-k carbon doped oxide films with low residual stress | Qingguo Wu, Haiying Fu, Dong Niu, Ananda K. Bandyopadhyay | 2010-08-24 |
| 7622400 | Method for improving mechanical properties of low dielectric constant materials | Keith Fox, Easwar Srinivasan, Qingguo Wu | 2009-11-24 |
| 7611757 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, Easwar Srinivasan | 2009-11-03 |
| 7473653 | Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups | Qingguo Wu, Haiying Fu, David Craig Smith | 2009-01-06 |
| 7265061 | Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties | Seon-Mee Cho, Easwar Srinivasan, Brian Lu | 2007-09-04 |
| 7253125 | Method to improve mechanical strength of low-k dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, Easwar Srinivasan | 2007-08-07 |
| 7241704 | Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups | Qingguo Wu, Haiying Fu, David Craig Smith | 2007-07-10 |
| 6214526 | Semiconductor processing using antireflective layer having high wet etch rate | Srinivasan Sundararajan, Kenneth P. MacWilliams | 2001-04-10 |
| 5114242 | Bichannel radiation detection method | Arnon Gat | 1992-05-19 |