| 12347648 |
Filter box for a substrate processing system |
Miguel Benjamin Vasquez |
2025-07-01 |
| 12243725 |
High temperature RF connection with integral thermal choke |
Timothy Scott Thomas, Vincent E. Burkhart, Joel Hollingsworth, Damien Slevin |
2025-03-04 |
| 12217939 |
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks |
Vincent E. Burkhart, Karl Leeser, Liang Meng |
2025-02-04 |
| 12146795 |
Temperature monitoring |
Christopher-James Parker, Keith Joseph Batryn, Dirk Rudolph |
2024-11-19 |
| 11994542 |
RF signal parameter measurement in an integrated circuit fabrication chamber |
Sunil Kapoor |
2024-05-28 |
| 11837441 |
Depositing a carbon hardmask by high power pulsed low frequency RF |
Matthew Scott Weimer, Pramod Subramonium, Ragesh Puthenkovilakam, Rujun Bai |
2023-12-05 |
| 11823928 |
Control of wafer bow in multiple stations |
Edward Augustyniak, Sunil Kapoor, Yukinori Sakiyama, George Thomas |
2023-11-21 |
| 11594397 |
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system |
Eller Y. Juco, Karl Leeser, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more |
2023-02-28 |
| 11470693 |
Apparatus and method to control electromagnetic heating of ceramic materials |
Brad W. Hoff |
2022-10-11 |
| 11469084 |
High temperature RF connection with integral thermal choke |
Timothy Scott Thomas, Vince Burkhart, Joel Hollingsworth, Damien Slevin |
2022-10-11 |
| 11183368 |
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks |
Vincent E. Burkhart, Karl Leeser, Liang Meng |
2021-11-23 |
| 11183406 |
Control of wafer bow in multiple stations |
Edward Augustyniak, Sunil Kapoor, Yukinori Sakiyama, George Thomas |
2021-11-23 |
| 10991550 |
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system |
Eller Y. Juco, Karl Leeser, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more |
2021-04-27 |
| 10553465 |
Control of water bow in multiple stations |
Edward Augustyniak, Sunil Kapoor, Yukinori Sakiyama, George Thomas |
2020-02-04 |
| 9819320 |
Coaxial amplifier device |
Brad W. Hoff |
2017-11-14 |
| 9685296 |
Nonlinear transmission line based electron beam density modulator |
Brad W. Hoff, Donald A. Shiffler, Susan L. Heidger, Wilkin Wai-Hang Tang |
2017-06-20 |
| 9281809 |
Nonlinear transmission line extraction systems |
Brad W. Hoff, Susan L. Heidger |
2016-03-08 |
| 8841867 |
Crossed field device |
Ronald M. Gilgenbach, Yue-Ying Lau, Brad W. Hoff, John Luginsland, Matthew A. Franzi |
2014-09-23 |
| 8766541 |
Nonlinear transmission line modulated electron beam emission |
Brad W. Hoff, Donald A. Shiffler, Susan L. Heidger, Wilkin Wai-Hang Tang |
2014-07-01 |
| 4508765 |
Synthetic resins and coating compositions containing them |
John Ring, Michael Hickling, Michael G. Sturgess |
1985-04-02 |
| 4389265 |
Breakdown of solid propellants and explosives, recovery of nitramines |
Albert S. Tompa, Billy Ray White |
1983-06-21 |
| 4315830 |
Method for altering the characteristics of polymers |
J. T. L. Rosborough, Clyde J. Swedenberg |
1982-02-16 |
