| 6796517 |
Apparatus for the application of developing solution to a semiconductor wafer |
— |
2004-09-28 |
| 6642152 |
Method for ultra thin resist linewidth reduction using implantation |
Che-Hoo Ng, Scott A. Bell, Anne E. Sanderfer |
2003-11-04 |
| 6496596 |
Method for detecting and categorizing defects |
Steven J. Zika |
2002-12-17 |
| 6479879 |
Low defect organic BARC coating in a semiconductor structure |
Alexander H. Nickel |
2002-11-12 |
| 6475905 |
Optimization of organic bottom anti-reflective coating (BARC) thickness for dual damascene process |
Ramkumar Subramanian |
2002-11-05 |
| 6420097 |
Hardmask trim process |
Scott A. Bell |
2002-07-16 |
| 6410927 |
Semiconductor wafer alignment method using an identification scribe |
— |
2002-06-25 |
| 6411378 |
Mask, structures, and method for calibration of patterned defect inspections |
— |
2002-06-25 |
| 6326319 |
Method for coating ultra-thin resist films |
Khanh B. Nguyen, Christopher F. Lyons |
2001-12-04 |
| 6288411 |
Defect collecting structures for photolithography |
— |
2001-09-11 |
| 6281130 |
Method for developing ultra-thin resist films |
— |
2001-08-28 |
| 6257446 |
Liquid chemical container with integrated fluid reservoir |
— |
2001-07-10 |
| 6240874 |
Integrated edge exposure and hot/cool plate for a wafer track system |
— |
2001-06-05 |
| 6217936 |
Semiconductor fabrication extended particle collection cup |
— |
2001-04-17 |
| 6176274 |
Method and system for measuring fluid volume in a photolithography track |
Vincent L. Marinaro |
2001-01-23 |
| 6174632 |
Wafer defect detection method utilizing wafer with development residue attracting area |
— |
2001-01-16 |
| 6100505 |
Hotplate offset ring |
— |
2000-08-08 |
| 5940651 |
Drip catching apparatus for receiving excess photoresist developer solution |
David A. Steele |
1999-08-17 |