Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692705 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Mihail Mihaylov, Xinkang Tian, Ching-Ling Meng, Jason Ferns, Joel Ng +2 more | 2020-06-23 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Adam E. Norton, Fred E. Stanke | 2003-06-03 |