Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7289213 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +1 more | 2007-10-30 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Mehrdad Nikoonahad, Ady Levy, Daniel Wack, Noah Bareket +2 more | 2007-10-09 |
| 7099005 | System for scatterometric measurements and applications | Guoheng Zhao, Daniel Wack, Mehrdad Nikoonahad | 2006-08-29 |
| 7023549 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Mehrdad Nikoonahad | 2006-04-04 |
| 6900892 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Mehrdad Nikoonahad | 2005-05-31 |