| 11207715 |
System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays |
Jeffery W. Butterbaugh, Christina Ann Rathman |
2021-12-28 |
| 9666456 |
Method and apparatus for treating a workpiece with arrays of nozzles |
Jimmy D. Collins, David DeKraker, Tracy A. Gast |
2017-05-30 |
| 9564378 |
Detection of lost wafer from spinning chuck |
Michael Gruenhagen |
2017-02-07 |
| 9039840 |
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation |
Jeffrey M. Lauerhaas, Jimmy D. Collins, Tracy A. Gast |
2015-05-26 |
| 8978675 |
Method and apparatus for treating a workpiece with arrays of nozzles |
Jimmy D. Collins, David DeKraker, Tracy A. Gast |
2015-03-17 |
| 8967167 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, David DeKraker, Tracy A. Gast |
2015-03-03 |
| 8899248 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, James M. Eppes, Kader Mekias |
2014-12-02 |
| 8684015 |
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation |
Jeffrey M. Lauerhaas, Jimmy D. Collins, Tracy A. Gast |
2014-04-01 |
| 8668778 |
Method of removing liquid from a barrier structure |
Jimmy D. Collins, David DeKraker, Tracy A. Gast |
2014-03-11 |
| 8656936 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, James M. Eppes, Kader Mekias |
2014-02-25 |
| 8544483 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, James M. Eppes, Kader Mekias |
2013-10-01 |
| 8387635 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, David DeKraker, Tracy A. Gast |
2013-03-05 |
| 8235062 |
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation |
Jeffrey M. Lauerhaas, Jimmy D. Collins, Tracy A. Gast |
2012-08-07 |
| 7913706 |
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses |
David DeKraker, Jimmy D. Collins, Tracy A. Gast, Richard E. Williamson |
2011-03-29 |
| 7681581 |
Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Darian Carr, James M. Eppes, Stephen Hanson |
2010-03-23 |
| 5423942 |
Method and apparatus for reducing etching erosion in a plasma containment tube |
Roger A. Robbins, Donald E. Brown, David W. Buck |
1995-06-13 |
| 4820371 |
Apertured ring for exhausting plasma reactor gases |
— |
1989-04-11 |
| 4792378 |
Gas dispersion disk for use in plasma enhanced chemical vapor deposition reactor |
Robert M. Kennedy |
1988-12-20 |