Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7264179 | Method and apparatus for MEMS device nebulizer lubrication system | — | 2007-09-04 |
| 6992375 | Anchor for device package | Jwei Liu, Jack Smith, Edward Fisher, Joyce Holton | 2006-01-31 |
| 6921680 | Method and apparatus for MEMS device nebulizer lubrication system | — | 2005-07-26 |
| 6365229 | Surface treatment material deposition and recapture | — | 2002-04-02 |
| 6300294 | Lubricant delivery for micromechanical devices | Simon Joshua Jacobs | 2001-10-09 |
| 5474614 | Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp | — | 1995-12-12 |
| 5423942 | Method and apparatus for reducing etching erosion in a plasma containment tube | Donald E. Brown, David W. Buck, Alan D. Rose | 1995-06-13 |
| 5266527 | Conformal wafer chuck for plasma processing having a non-planar surface | — | 1993-11-30 |