Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927461 | Gas diffuser support structure for reduced particle generation | Robin L. Tiner, Lai ZHAO, Soo Young Choi | 2021-02-23 |
| 10923327 | Chamber liner | Jianheng Li, Lai ZHAO, Robin L. Tiner, Gaku Furuta, Soo Young Choi | 2021-02-16 |
| 10883174 | Gas diffuser mounting plate for reduced particle generation | Hsiang AN, Lai ZHAO, Jianhua Zhou, Robin L. Tiner | 2021-01-05 |
| 9822449 | Showerhead support structures | Robin L. Tiner | 2017-11-21 |
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more | 2011-03-15 |
| 7697260 | Detachable electrostatic chuck | Karl M. Brown, Nora Arellano, Semyon Sherstinsky, Cheng-Hsiung Tsai, Vineet Haresh Mehta +2 more | 2010-04-13 |
| 7480129 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more | 2009-01-20 |
| 7252737 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky | 2007-08-07 |
| 7148435 | Build-in LOTO device on equipment breaker panel | Michael Rosenstein, Carl Johnson, Sharon Niehoff | 2006-12-12 |
| 6837968 | Lower pedestal shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky | 2005-01-04 |
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Michael Rosenstein, Marc Schweitzer | 2004-12-07 |
| 6726805 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky | 2004-04-27 |
| 6669829 | Shutter disk and blade alignment sensor | Michael Feltsman, Michael Rosenstein, Marc Schweitzer | 2003-12-30 |
| 6652713 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky | 2003-11-25 |