| 11101134 |
Method and apparatus to eliminate contaminant particles from an accelerated neutral atom beam and thereby protect a beam target |
— |
2021-08-24 |
| 11048162 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
Sean R. Kirkpatrick |
2021-06-29 |
| 10971324 |
Treatment method for inhibiting platelet attachment and articles treated thereby |
Joseph Khoury, Sean R. Kirkpatrick, Michael J. Walsh, James G. Bachand |
2021-04-06 |
| 10858732 |
Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby |
Sean R. Kirkpatrick, Michael J. Walsh |
2020-12-08 |
| 10825685 |
Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby |
Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga |
2020-11-03 |
| 10627352 |
Methods and apparatus for employing an accelerated neutral beam for improved surface analysis |
Sean R. Kirkpatrick |
2020-04-21 |
| 10409155 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
Sean R. Kirkpatrick |
2019-09-10 |
| 10202684 |
Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby |
Sean R. Kirkpatrick, Michael J. Walsh |
2019-02-12 |
| 10181402 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby |
Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga |
2019-01-15 |
| 9799488 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga |
2017-10-24 |
| 9117628 |
Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith |
Sean R. Kirkpatrick |
2015-08-25 |
| 8847148 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
Sean R. Kirkpatrick |
2014-09-30 |
| 8629393 |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
Sean R. Kirkpatrick |
2014-01-14 |
| 7410890 |
Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation |
Sean R. Kirkpatrick, Martin D. Tabat, Thomas G. Tetreault, John O. Borland, John Hautala +1 more |
2008-08-12 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Robert K. Becker, Avrum Freytsis |
2004-01-13 |
| 6624081 |
Enhanced etching/smoothing of dielectric surfaces |
Jerald P. Dykstra, David Mount, Wesley Skinner |
2003-09-23 |
| 6613240 |
Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
Wesley Skinner |
2003-09-02 |
| 6491800 |
Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology |
Vincent DiFilippo |
2002-12-10 |
| 6416820 |
Method for forming carbonaceous hard film |
Isao Yamada, Jiro Matsuo, Teruyuki Kitagawa |
2002-07-09 |
| 6331227 |
Enhanced etching/smoothing of dielectric surfaces |
Jerald P. Dykstra, David Mount, Wesley Skinner |
2001-12-18 |
| 5855967 |
Method of protecting surfaces on diamond, diamondlike carbon or carbon |
— |
1999-01-05 |
| 5082359 |
Diamond films and method of growing diamond films on nondiamond substrates |
— |
1992-01-21 |
| 4285714 |
Electrostatic bonding using externally applied pressure |
— |
1981-08-25 |
| 4229232 |
Method involving pulsed beam processing of metallic and dielectric materials |
— |
1980-10-21 |