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Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas |
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| 9206500 |
Method and apparatus for surface processing of a substrate using an energetic particle beam |
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Ion sources and methods for generating an ion beam with controllable ion current density distribution |
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2014-09-16 |
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Methods of operating an electromagnet of an ion source |
Rustam Yevtukhov, Viktor Kanarov, Boris L. Druz |
2012-04-17 |
| 7879201 |
Method and apparatus for surface processing of a substrate |
Boris L. Druz, Viktor Kanarov, Hariharakeshave S. Hegde, Emmanuel Lakios |
2011-02-01 |
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Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
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2009-07-07 |
| 7414355 |
Charged particle beam extraction and formation apparatus |
Viktor Kanarov, Rustam Yevtukhov, Daniel Yakovlevitch |
2008-08-19 |
| 7183716 |
Charged particle source and operation thereof |
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2007-02-27 |
| 7005782 |
Charged particle beam extraction and formation apparatus |
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2006-02-28 |
| 6774550 |
Charged particle beam extraction and formation apparatus |
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2004-08-10 |
| 6716322 |
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Hari Hedge, Boris L. Druz, Viktor Kanarov, Adrian Devasahayam, Emmanuel Lakios |
2004-04-06 |
| 6590324 |
Charged particle beam extraction and formation apparatus |
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2003-07-08 |
| 6545580 |
Electromagnetic field generator and method of operation |
Hari Hegde, Mihai S. Risca, Abraham J. Navy, Roger P. Fremgen |
2003-04-08 |
| 6464891 |
Method for repetitive ion beam processing with a carbon containing ion beam |
Boris L. Druz, Kurt E. Williams |
2002-10-15 |
| 6225747 |
Charged-particle source, control system and process using gating to extract the charged particle beam |
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| 6150755 |
Charged particle source with liquid electrode |
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2000-11-21 |
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Charged-particle source, control system, and process using gating to extract the ion beam |
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1999-11-09 |
| 5969470 |
Charged particle source |
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1999-10-19 |
| 4724474 |
Power bridge rectifier assembly |
Richard J. Duchek, Gregory T. Laux, Francis M. Ray |
1988-02-09 |
