Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308284 | Plug and trench architectures for integrated circuits and methods of manufacture | Charles H. Wallace, Hyunsoo Park, Mohit K. HARAN, Alexander F. Kaplan, Ruth A. Brain | 2025-05-20 |
| 12051623 | Enhanced grating aligned patterning for EUV direct print processes | Seyedhamed M Barghi, Shyam Benegal KADALI, Sheng-Po Fang, Leonard P. GULER, Charles H. Wallace +1 more | 2024-07-30 |
| 11652045 | Via contact patterning method to increase edge placement error margin | Mohit K. HARAN, Daniel James Bahr, Deepak S. Rao, Seungdo An, Debashish Basu +6 more | 2023-05-16 |
| 11211324 | Via contact patterning method to increase edge placement error margin | Mohit K. HARAN, Daniel James Bahr, Deepak S. Rao, Seungdo An, Debashish Basu +6 more | 2021-12-28 |
| 11171043 | Plug and trench architectures for integrated circuits and methods of manufacture | Charles H. Wallace, Hyunsoo Park, Mohit K. HARAN, Alexander F. Kaplan, Ruth A. Brain | 2021-11-09 |