Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7652272 | Plasma-based debris mitigation for extreme ultraviolet (EUV) light source | David N. Ruzic, Robert L. Bristol | 2010-01-26 |
| 7567379 | Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system | Robert L. Bristol, Ming Fang, John Barnak, Melissa Shell | 2009-07-28 |
| 7527920 | Active hardmask for lithographic patterning | Michael Goldstein, Manish Chandhok, Eric Panning, Robert L. Bristol | 2009-05-05 |
| 7446329 | Erosion resistance of EUV source electrodes | Robert L. Bristol, Arun Ramamoorthy | 2008-11-04 |
| 7329588 | Forming a reticle for extreme ultraviolet radiation and structures formed thereby | Kramadhati V. Ravi | 2008-02-12 |
| 7230258 | Plasma-based debris mitigation for extreme ultraviolet (EUV) light source | David N. Ruzic, Robert L. Bristol | 2007-06-12 |
| 7208747 | Adjustment of distance between source plasma and mirrors to change partial coherence | Manish Chandhok, Eric Panning | 2007-04-24 |
| 7180082 | Method for plasma formation for extreme ultraviolet lithography-theta pinch | Ahmed Hassanein, Isak Konkashbaev | 2007-02-20 |
| 7153615 | Extreme ultraviolet pellicle using a thin film and supportive mesh | Robert L. Bristol | 2006-12-26 |
| 7109504 | Extreme ultraviolet illumination source | Manish Chandhok, Eric Panning | 2006-09-19 |
| 7098466 | Adjustable illumination source | Manish Chandhok, Eric Panning | 2006-08-29 |
| 7078700 | Optics for extreme ultraviolet lithography | Manish Chandhok, Robert L. Bristol | 2006-07-18 |
| 7049614 | Electrode in a discharge produced plasma extreme ultraviolet source | — | 2006-05-23 |
| 7033739 | Active hardmask for lithographic patterning | Michael Goldstein, Manish Chandhok, Eric Panning, Robert L. Bristol | 2006-04-25 |
| 6847044 | Electrical discharge gas plasma EUV source insulator components | Kramadhati V. Ravi | 2005-01-25 |
| 6787788 | Electrode insulator materials for use in extreme ultraviolet electric discharge sources | Melissa Shell | 2004-09-07 |