Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211680 | Pulsed power module with pulse and ion flux control for magnetron sputtering | Robert A. Stubbers, Brian E. Jurczyk | 2025-01-28 |
| 11069515 | Pulsed power module with pulse and ion flux control for magnetron sputtering | Robert A. Stubbers, Brian E. Jurczyk | 2021-07-20 |
| 10752994 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Zihao Ouyang, Tae Seung Cho | 2020-08-25 |
| 10531553 | Scalable multi-role surface-wave plasma generator | Robert A. Stubbers, Brian E. Jurczyk | 2020-01-07 |
| 10510550 | Polarization-dependent laser-assisted plasma etching | Jason Anthony Peck | 2019-12-17 |
| 10332731 | Method of and magnet assembly for high power pulsed magnetron sputtering | Ivan Shchelkanov, Priya Raman | 2019-06-25 |
| 10167556 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Zihao Ouyang, Tae Seung Cho | 2019-01-01 |
| 9867269 | Scalable multi-role surface-wave plasma generator | Robert A. Stubbers, Brian E. Jurczyk | 2018-01-09 |
| 9171733 | Method of selectively etching a three-dimensional structure | John R. Sporre | 2015-10-27 |
| 8486843 | Method of forming nanoscale three-dimensional patterns in a porous material | Xiuling Li, Ik Su Chun, Edmond K. C. Chow, Randolph Estal Flauta | 2013-07-16 |
| 7652272 | Plasma-based debris mitigation for extreme ultraviolet (EUV) light source | Robert L. Bristol, Bryan Rice | 2010-01-26 |
| 7528386 | Submicron particle removal | Brian E. Jurczyk, Darren A. Alman, Martin John Neumann, Huatan Qiu | 2009-05-05 |
| 7230258 | Plasma-based debris mitigation for extreme ultraviolet (EUV) light source | Robert L. Bristol, Bryan Rice | 2007-06-12 |
| 6841044 | Chemically-enhanced physical vapor deposition | — | 2005-01-11 |
| 4414244 | Surface modification to waveguides | John R. Timberlake, Richard L. Moore, Samuel A. Cohen, Dennis M. Manos | 1983-11-08 |