Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752994 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | David N. Ruzic, Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Tae Seung Cho | 2020-08-25 |
| 10361091 | Porous low-k dielectric etch | Eric A. Hudson, Shashank Deshmukh, Sonny Li, Chia-Chun Wang, Prabhakara Gopaladasu | 2019-07-23 |
| 10167556 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | David N. Ruzic, Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Tae Seung Cho | 2019-01-01 |