Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8865376 | EUVL process structure fabrication methods | Vibhu Jindal, Frank E. Goodwin, Patrick Kearney | 2014-10-21 | $23,195,000 |
| 7527920 | Active hardmask for lithographic patterning | Michael Goldstein, Manish Chandhok, Robert L. Bristol, Bryan Rice | 2009-05-05 | $25,050,000 |
| 7316893 | Modular containment cell arrangements | Hok-Kin Choi | 2008-01-08 | $13,798,000 |
| 7208747 | Adjustment of distance between source plasma and mirrors to change partial coherence | Manish Chandhok, Bryan Rice | 2007-04-24 | $13,574,000 |
| 7154101 | EUV energy detection | — | 2006-12-26 | $11,208,000 |
| 7109504 | Extreme ultraviolet illumination source | Manish Chandhok, Bryan Rice | 2006-09-19 | $12,802,000 |
| 7098466 | Adjustable illumination source | Manish Chandhok, Bryan Rice | 2006-08-29 | $13,270,000 |
| 7033739 | Active hardmask for lithographic patterning | Michael Goldstein, Manish Chandhok, Robert L. Bristol, Bryan Rice | 2006-04-25 | $12,896,000 |