Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › EUVL process structure fabrication methods

EUVL process structure fabrication methods

US Patent 8865376 · Granted Oct 21, 2014

Estimated economic value: $23,195,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multicathode deposition system and methods2024
Reticle processing system2024
Multi-chamber substrate processing platform2024
Extreme ultraviolet mask absorber materials2024
Multilayer extreme ultraviolet reflector materials2023
Extreme ultraviolet mask blank defect reduction2023
Multilayer extreme ultraviolet reflectors2023
Multilayer extreme ultraviolet reflectors2023
Extreme ultraviolet mask blank with multilayer absorber and method of manufactur2023
Graded interface in Bragg reflector2023
Extreme ultraviolet mask absorber materials2023
Deposition system with a multi-cathode2023