Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610543 | Method for simultaneous structuring and chip singulation | Ursula Hedenig, Michael Roesner, Gudrun Stranzl, Martin Zgaga | 2017-04-04 |
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Guenter Denifl, Daniel Maurer, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9439017 | Method for manufacturing a plurality of microphone structures, microphone and mobile device | Ursula Hedenig, Daniel Maurer, Peter Irsigler, Soenke Pirk, Andre Brockmeier | 2016-09-06 |
| 9417186 | Opto-electronic sensor | Bernhard Jakoby, Ventsislav Lachiev, Peter Irsigler, Ursula Hedenig, Sokratis Sgouridis +1 more | 2016-08-16 |
| 9363609 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Wolfgang Friza, Klaus Muemmler, Guenter Ziegler, Carsten Ahrens | 2016-06-07 |
| 9212045 | Micro mechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Daniel Maurer, Ursula Hedenig +2 more | 2015-12-15 |
| 8871550 | Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness | Ursula Hedenig, Martin Zgaga, Daniel Maurer | 2014-10-28 |
| 8575037 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Wolfgang Friza, Klaus Muemmler, Guenter Zieger, Carsten Ahrens | 2013-11-05 |