| 4954142 |
Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor |
Jeffrey Carr, Lawrence D. David, William L. Guthrie, Frank B. Kaufman, Kenneth P. Rodbell +2 more |
1990-09-04 |
| 4944836 |
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
Klaus D. Beyer, William L. Guthrie, Stanley R. Makarewicz, Eric Mendel, Kathleen Anne Perry +4 more |
1990-07-31 |
| 4789648 |
Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias |
Melanie M. Chow, John Cronin, William L. Guthrie, Carter W. Kaanta, Barbara Luther +2 more |
1988-12-06 |
| 4717596 |
Method for vacuum vapor deposition with improved mass flow control |
Steven G. Barbee, Gregory P. Devine, Gerard Seeley |
1988-01-05 |
| 4640221 |
Vacuum deposition system with improved mass flow control |
Steven G. Barbee, Gregory P. Devine, Gerard Seeley |
1987-02-03 |
| 4437922 |
Method for tailoring oxygen precipitate particle density and distribution silicon wafers |
Bernard K. Bischoff, Thomas H. Strudwick |
1984-03-20 |
