| 4944836 |
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
Klaus D. Beyer, William L. Guthrie, Stanley R. Makarewicz, Eric Mendel, William J. Patrick +4 more |
1990-07-31 |
| 4789648 |
Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias |
Melanie M. Chow, John Cronin, William L. Guthrie, Carter W. Kaanta, Barbara Luther +2 more |
1988-12-06 |
| 4601939 |
Composite insulator structure |
George Gati, Albert P. Lee, Geraldine C. Schwartz |
1986-07-22 |
| 4447824 |
Planar multi-level metal process with built-in etch stop |
Joseph S. Logan, John L. Mauer, IV, Laura Rothman, Geraldine C. Schwartz |
1984-05-08 |
| 4439270 |
Process for the controlled etching of tapered vias in borosilicate glass dielectrics |
Jimmie L. Powell, John Suierveld |
1984-03-27 |
| 4367119 |
Planar multi-level metal process with built-in etch stop |
Joseph S. Logan, John L. Mauer, IV, Laura Rothman, Geraldine C. Schwartz |
1983-01-04 |
