Issued Patents All Time
Showing 76–88 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9306164 | Electrode pair fabrication using directed self assembly of diblock copolymers | Josephine B. Chang, Michael A. Guillorn, Adam M. Pyzyna, HsinYu Tsai | 2016-04-05 |
| 9281212 | Dielectric tone inversion materials | Martin Glodde, Wu-Song Huang, Ratnam Sooriyakumaran, HsinYu Tsai | 2016-03-08 |
| 9263393 | Sputter and surface modification etch processing for metal patterning in integrated circuits | Cyril Cabral, Jr., Benjamin L. Fletcher, Nicholas C. M. Fuller, Eric A. Joseph | 2016-02-16 |
| 9190316 | Low energy etch process for nitrogen-containing dielectric layer | Markus Brink, Robert L. Bruce, Sebastian U. Engelmann, Nicholas C. M. Fuller, Masahiro Nakamura | 2015-11-17 |
| 9171796 | Sidewall image transfer for heavy metal patterning in integrated circuits | Markus Brink, Michael A. Guillorn, Mark Hoinkis, Eric A. Joseph, Bang N. To | 2015-10-27 |
| 9114438 | Copper residue chamber clean | Mark Hoinkis, Chun Yan, Eric A. Joseph | 2015-08-25 |
| 9064727 | Sputter and surface modification etch processing for metal patterning in integrated circuits | Cyril Cabral, Jr., Benjamin L. Fletcher, Nicholas C. M. Fuller, Eric A. Joseph | 2015-06-23 |
| 8987031 | Fabricating a small-scale radiation detector | Michael S. Gordon, Christopher V. Jahnes, Eric A. Joseph, Kenneth P. Rodbell, Arun Sharma +1 more | 2015-03-24 |
| 8921030 | Tone inversion of self-assembled self-aligned structures | Michael A. Guillorn, Steven J. Holmes, Chi-Chun Liu, HsinYu Tsai | 2014-12-30 |
| 8916054 | High fidelity patterning employing a fluorohydrocarbon-containing polymer | Markus Brink, Sebastian U. Engelmann, Nicholas C. M. Fuller, Michael A. Guillorn, Masahiro Nakamura | 2014-12-23 |
| 8871107 | Subtractive plasma etching of a blanket layer of metal or metal alloy | Nicholas C. M. Fuller, Eric A. Joseph, Mark Hoinkis, Chun Yan | 2014-10-28 |
| 8771929 | Tone inversion of self-assembled self-aligned structures | Michael A. Guillorn, Steven J. Holmes, Chi-Chun Liu, HsinYu Tsai | 2014-07-08 |
| 8633117 | Sputter and surface modification etch processing for metal patterning in integrated circuits | Cyril Cabral, Jr., Benjamin L. Fletcher, Nicholas C. M. Fuller, Eric A. Joseph | 2014-01-21 |