Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348837 | Projection exposure apparatus and pattern forming method for use therewith | Hiroshi Fukuda, Ryoko Yamanaka, Tsutomu Tawa, Seiji Yonezawa | 1994-09-20 |
| 5331369 | Method of forming patterns and apparatus for carrying out the same | Katsunobu Hama, Soichi Katagiri | 1994-07-19 |
| 5316896 | Method of forming a pattern | Hiroshi Fukuda | 1994-05-31 |
| 5305364 | Projection type X-ray lithography apparatus | Kozo Mochiji, Hiroaki Oizumi, Shigeo Moriyama, Shinji Okazaki, Masaaki Itou | 1994-04-19 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Minori Noguchi +1 more | 1994-04-12 |
| 5296995 | Method of magnetically recording and reading data, magnetic recording medium, its production method and magnetic recording apparatus | Seiji Yonezawa, Keiji Kataoka, Hajime Fukke, Keizo Kato, Harukazu Miyamoto +3 more | 1994-03-22 |
| 5235400 | Method of and apparatus for detecting defect on photomask | Norio Hasegawa, Toshihiko Tanaka, Hiroshi Fukuda, Toshiei Kurosaki | 1993-08-10 |
| 5222112 | X-ray pattern masking by a reflective reduction projection optical system | Masaaki Itou, Shigeo Moriyama, Soichi Katagiri, Hiroshi Fukuda | 1993-06-22 |
| 5200798 | Method of position detection and the method and apparatus of printing patterns by use of the position detection method | Soichi Katagiri, Shigeo Moriyama, Masaaki Itou | 1993-04-06 |
| 5078495 | Monochromator | Tatsuo Harada, Toshiei Kurosaki, Toshiaki Kita | 1992-01-07 |
| 4983039 | Spectrometer | Tatsuo Harada, Toshiei Kurosaki, Toshiaki Kita | 1991-01-08 |
| 4894343 | Chamber plate for use in cell fusion and a process for production thereof | Shinji Tanaka, Kazuo Sato, Yoshio Kawamura, Hisashi Tsuruoka | 1990-01-16 |
| 4798470 | Pattern printing method and apparatus | Shigeo Moriyama, Toshiei Kurosaki, Shinji Okazaki, Yoshio Kawamura | 1989-01-17 |
| 4750364 | Angular velocity and acceleration sensor | Yoshio Kawamura, Kazuo Sato, Shinji Tanaka | 1988-06-14 |
| 4614432 | Pattern detector | Shinji Kuniyoshi, Toshiei Kurosaki, Yoshio Kawamura, Sumio Hosaka, Akihiro Takanashi | 1986-09-30 |
| 4597669 | Pattern detector | Shinji Kuniyoshi, Akihiro Takanashi, Toshiei Kurosaki, Yoshio Kawamura, Sumio Hosaka | 1986-07-01 |
| 4504726 | Pattern generator | Sumio Hosaka, Akihiro Takanashi, Toshiei Kurosaki, Shinji Kuniyoshi, Yoshio Kawamura | 1985-03-12 |
| 4477183 | Automatic focusing apparatus | Yoshio Kawamura, Akihiro Takanashi, Toshiei Kurosaki, Shinji Kuniyoshi, Sumio Hosaka | 1984-10-16 |
| 4441206 | Pattern detecting apparatus | Shinji Kuniyoshi, Akihiro Takanashi, Toshiei Kurosaki, Sumio Hosaka, Yoshio Kawamura | 1984-04-03 |