Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6286024 | High-efficiency multiplier and multiplying method | Naoka Yano | 2001-09-04 |
| 6221201 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2001-04-24 |
| 6217705 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshitumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2001-04-17 |
| 6161867 | Underguard skid bar | — | 2000-12-19 |
| 6048434 | Substrate holding system including an electrostatic chuck | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2000-04-11 |
| 5985035 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-11-16 |
| 5961774 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-10-05 |
| 5906684 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-05-25 |
| 5792304 | Method of holding substrate and substrate holding system | Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1998-08-11 |
| 5685684 | Vacuum processing system | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou, Kenji Nakata +1 more | 1997-11-11 |
| 5673750 | Vacuum processing method and apparatus | Tsunehiko Tsubone, Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1997-10-07 |
| 5663884 | Multiprocessing apparatus | Kouji Nishihata, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone | 1997-09-02 |
| 5607510 | Vacuum processing apparatus | Akitaka Makino, Tetsunori Kaji | 1997-03-04 |
| 5587205 | Plasma processing method and an apparatus for carrying out the same | Hiroshi Saito, Yasumichi Suzuki | 1996-12-24 |
| 5580420 | Plasma generating method and apparatus and plasma processing method and apparatus | Katsuya Watanabe, Tetsunori Kaji, Kenji Nakata, Hiroyuki Shichida, Seiichi Watanabe +2 more | 1996-12-03 |
| 5574247 | CVD reactor apparatus | Eisuke Nishitani, Susmu Tsuzuku, Natsuyo Chiba, Shigeru Kobayashi, Norihiro Uchida | 1996-11-12 |
| 5556204 | Method and apparatus for detecting the temperature of a sample | Manabu Edamura, Kazue Takahashi | 1996-09-17 |
| 5536359 | Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber | Hiroki Kawada, Kazue Takahashi, Manabu Edamura, Saburo Kanai | 1996-07-16 |
| 5458687 | Method of and apparatus for securing and cooling/heating a wafer | Hiroyuki Shichida, Akitaka Makino | 1995-10-17 |
| 5448470 | Multiprocessing apparatus | Kouji Nishihata, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone | 1995-09-05 |
| 5445484 | Vacuum processing system | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 1995-08-29 |
| 5391260 | Vacuum processing apparatus | Akitaka Makino, Tetsunori Kaji | 1995-02-21 |
| 5326009 | Air nozzle for use in production of nonwoven fabric | Yoshinori Kobayashi, Haruo Sasako | 1994-07-05 |
| 5320982 | Wafer cooling method and apparatus | Tsunehiko Tsubone, Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 1994-06-14 |
| 5259735 | Evacuation system and method therefor | Kazue Takahashi, Shinjiro Ueda, Manabu Edamura, Kazuaki Ichihashi | 1993-11-09 |