Issued Patents All Time
Showing 51–75 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528403 | Fabrication process of a semiconductor integrated circuit device | Yoshikazu Tanabe, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki | 2003-03-04 |
| 6528888 | Integrated circuit and method | Chih-Chen Cho, Jeffrey McKee, William R. McKee, Robert Tsu | 2003-03-04 |
| 6521932 | Semiconductor device with copper wiring connected to storage capacitor | Yukihiro Kumagai, Hideo Miura, Hiroyuki Ohta, Tomio Iwasaki | 2003-02-18 |
| 6503819 | Fabrication process of a semiconductor integrated circuit device | Yoshikazu Tanabe, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki | 2003-01-07 |
| 6492730 | Method for fabricating semiconductor integrated circuit | Yoshitaka Nakamura, Tsuyoshi Tamaru, Naoki Fukuda, Hidekazu Goto, Hideo Aoki +5 more | 2002-12-10 |
| 6483136 | Semiconductor integrated circuit and method of fabricating the same | Makoto Yoshida, Takahiro Kumauchi, Yoshitaka Tadaki, Norio Hasegawa, Keizo Kawakita | 2002-11-19 |
| 6426255 | Process for making a semiconductor integrated circuit device having a dynamic random access memory | Yoshitaka Nakamura, Yuzuru Ohji, Tatsuyuki Saito, Takashi Yunogami | 2002-07-30 |
| 6417045 | Method of manufacturing a semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity | Robert Tsu | 2002-07-09 |
| 6399438 | Method of manufacturing semiconductor integrated circuit device having a capacitor | Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada +8 more | 2002-06-04 |
| 6342412 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2002-01-29 |
| 6329681 | Semiconductor integrated circuit device and method of manufacturing the same | Yoshitaka Nakamura, Hideo Aoki, Yoshikazu Ohira, Tadashi Umezawa, Satoru Yamada +5 more | 2001-12-11 |
| 6294420 | Integrated circuit capacitor | Robert Tsu, Shinpei Iijima, William R. McKee | 2001-09-25 |
| 6281071 | Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring therefor and method of producing such wiring | Jun Murata, Yoshitaka Tadaki, Mitsuaki Horiuchi, Jun Sugiura, Hiroko Kaneko +6 more | 2001-08-28 |
| 6258649 | Semiconductor integrated circuit device and method of manufacturing the same | Yoshitaka Nakamura, Masayoshi Hirasawa, Tsuyoshi Tamaru, Satoru Yamada, Keizo Kawakita +3 more | 2001-07-10 |
| 6238961 | Semiconductor integrated circuit device and process for manufacturing the same | Osamu Tsuchiya | 2001-05-29 |
| 6215144 | Semiconductor integrated circuit device, and method of manufacturing the same | Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada +8 more | 2001-04-10 |
| 6197702 | Fabrication process of a semiconductor integrated circuit device | Yoshikazu Tanabe, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki | 2001-03-06 |
| 6168985 | Semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity and method of manufacturing same | Robert Tsu | 2001-01-02 |
| 6169324 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2001-01-02 |
| 6127255 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2000-10-03 |
| 6096597 | Method for fabricating an integrated circuit structure | Robert Tsu, William R. McKee, Shimpei Iijima, Masato Kunitomo, Tsuyoshi Tamaru | 2000-08-01 |
| 6037207 | Method of manufacturing semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity | Robert Tsu | 2000-03-14 |
| 6028360 | Semiconductor integrated circuit device in which a conductive film is formed over a trap film which in turn is formed over a titanium film | Yoshitaka Nakamura, Tsuyoshi Tamaru, Naoki Fukuda, Hidekazu Goto, Hideo Aoki +5 more | 2000-02-22 |
| 5981369 | Semiconductor integrated circuit device and process for manufacturing the same | Makoto Yoshida, Takahiro Kumauchi, Yoshitaka Tadaki, Kazuhiko Kajigaya, Hideo Aoki | 1999-11-09 |
| 5972769 | Self-aligned multiple crown storage capacitor and method of formation | Robert Tsu, Jing Shu, Jeffrey McKee | 1999-10-26 |