Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5153916 | Method and apparatus for detecting focal plane | Masataka Shiba, Yoshihiko Aiba | 1992-10-06 |
| 5134298 | Beam control method and apparatus | Ryuichi Funatsu, Yasuhiko Nakayama | 1992-07-28 |
| 5121449 | Information detecting system of scanning type | Masataka Shiba, Ryuichi Funatsu, Motoya Taniguchi, Minoru Tanaka | 1992-06-09 |
| 4825453 | X-ray exposure apparatus | Yukio Kembo, Yoshihiro Komeyama, Minoru Ikeda | 1989-04-25 |
| 4777641 | Method and apparatus for alignment | Yukio Kembo, Ryuichi Funatsu, Asahiro Kuni, Keiichi Okamoto, Yoshihiro Komeyama | 1988-10-11 |
| 4708484 | Projection alignment method and apparatus | Yoshihiro Komeyama, Yukio Kembo, Asahiro Kuni, Ryuuichi Funatsu, Minoru Ikeda +1 more | 1987-11-24 |
| 4666291 | Light-exposure apparatus | Motoya Taniguchi, Asahiro Kuni, Ryuichi Funatsu, Yukio Kembo | 1987-05-19 |