Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8901014 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording medium | Yosuke Ota, Naonori Akae, Yoshiro Hirose | 2014-12-02 |
| 8728954 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshinobu Nakamura | 2014-05-20 |
| 8546272 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura | 2013-10-01 |
| 8415258 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2013-04-09 |
| 8268731 | Semiconductor device producing method, substrate producing method and substrate processing apparatus | Naoto Nakamura, Iwao Nakamura | 2012-09-18 |
| 8252701 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yoshiro Hirose, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2012-08-28 |
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yushin Takasawa, Yosuke Ota | 2011-12-13 |
| 7901206 | Heat-treating apparatus and method of producing substrates | Akira Morohashi, Iwao Nakamura, Keishin Yamazaki, Sadao Nakashima | 2011-03-08 |
| 7891975 | Heat treatment apparatus and method of manufacturing substrate | Iwao Nakamura, Akira Morohashi, Ryuji Yamamoto | 2011-02-22 |
| 7820118 | Substrate processing apparatus having covered thermocouple for enhanced temperature control | Keishin Yamazaki, Iwao Nakamura | 2010-10-26 |
| 7625205 | Heat treatment apparatus and method of manufacturing substrates | Iwao Nakamura | 2009-12-01 |