Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935925 | Charged particle beam scanning method and charged particle beam apparatus | Makoto Ezumi, Makoto Nishihara, Tsutomu Kawai, Toshiaki Yanokura | 2011-05-03 |
| 7875858 | Charged particle beam trajectory corrector and charged particle beam apparatus | Hiroyuki Ito, Ryoichi Ishii, Takashi Doi | 2011-01-25 |
| 7872240 | Corrector for charged-particle beam aberration and charged-particle beam apparatus | Hiroyuki Ito, Yoshiya Higuchi, Takeshi Kawasaki | 2011-01-18 |
| 7728294 | Semiconductor wafer inspection tool and semiconductor wafer inspection method | Takashi Hiroi, Kenji Tanimoto, Hiroshi Makino | 2010-06-01 |
| 7714289 | Charged particle beam apparatus | Mitsugu Sato | 2010-05-11 |
| 7435960 | Charged particle beam apparatus | Makoto Suzuki, Kenji Tanimoto | 2008-10-14 |
| 7425702 | Charged particle beam apparatus | Mitsugu Sato | 2008-09-16 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Mari Nozoe, Hisaya Murakoshi +5 more | 2008-07-08 |
| 7241996 | Charged particle beam apparatus | Makoto Suzuki, Kenji Tanimoto | 2007-07-10 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Mari Nozoe, Hisaya Murakoshi +5 more | 2006-08-29 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 5190623 | Nuclear fuel reprocessing plant | Takashi Honda, Saburo Shoji, Shiro Kobayashi, Yasumasa Furutani | 1993-03-02 |
| 4610732 | Method of inhibiting corrosion of zirconium or its alloy | Katsumi Suzuki, Akira Minato, Tomio Yoshida | 1986-09-09 |