Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138606 | Wafer processing method | Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Koji Okuda | 2006-11-21 |
| 6895179 | Wafer stage for wafer processing apparatus | Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Koji Okuda | 2005-05-17 |
| 6825617 | Semiconductor processing apparatus | Seiichiro Kanno, Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideyuki Yamamoto | 2004-11-30 |
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Koji Okuda | 2003-11-11 |
| 5861601 | Microwave plasma processing apparatus and method | Yoshiaki Sato, Mitsuru Katamoto, Hironobu Kawahara, Minoru Soraoka, Tsuyoshi Umemoto +3 more | 1999-01-19 |