Issued Patents All Time
Showing 101–112 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8350213 | Charged particle beam detection unit with multi type detection subunits | Joe Wang, Xu Zhang | 2013-01-08 |
| 8294095 | Apparatus of plural charged particle beams with multi-axis magnetic lens | Weiming Ren, Kenichi Kanai, Xuedong Liu | 2012-10-23 |
| 8274046 | Monochromator for charged particle beam apparatus | Weiming Ren | 2012-09-25 |
| 8247136 | Carbon based electrocatalysts for fuel cells | Yushan Yan, Xin Wang, Wenzhen Li, Mahesh Waje, William A. Goddard, III +1 more | 2012-08-21 |
| 8164060 | System and method for a charged particle beam | Xuedong Liu, Xu Zhang, Joe Wang, Edward Tseng | 2012-04-24 |
| 8094924 | E-beam defect review system | Jack Jau, Yi Wang, Chung-Shih Pan, Joe Wang, Xuedong Liu +2 more | 2012-01-10 |
| 8003953 | Multi-axis magnetic lens | Weiming Ren, Kenichi Kanai, Xuedong Liu | 2011-08-23 |
| 7960697 | Electron beam apparatus | Weiming Ren, Joe Wang, Xuedong Liu, Juying Dou, Fumin He +5 more | 2011-06-14 |
| 7919760 | Operation stage for wafer edge inspection and review | Jack Jau, Hong Xiao, Joe Wang, Yi Wang, Edward Tseng | 2011-04-05 |
| 7825386 | System and method for a charged particle beam | Xuedong Liu, Xu Zhang, Joe Wang, Edward Tseng | 2010-11-02 |
| 6881956 | Method and apparatus for scanning semiconductor wafers using a scanning electron microscope | Jack Jau | 2005-04-19 |
| 6815345 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Yan Zhao, Chang-Chun Yeh, Jack Jau | 2004-11-09 |