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Low voltage MEMS relay filled with alternative gas mixture to SF6 |
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Reactive sputtering with HIPIMS |
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Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS) |
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Reactive sputtering with HIPIMs |
Juergen Weichart, Mohamed Elghazzali |
2020-09-22 |
| 10692707 |
RF substrate bias with high power impulse magnetron sputtering (HIPIMS) |
Jurgen Weichart |
2020-06-23 |
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Target shaping |
Jurgen Weichart |
2017-04-04 |
| 9587306 |
Method for producing a directional layer by cathode sputtering, and device for implementing the method |
Hartmut Rohrmann, Hanspeter Friedli, Jurgen Weichart, Martin Dubs |
2017-03-07 |
| 9355824 |
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS) |
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2016-05-31 |
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Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
Frantisek Balon, Juergen Weichart, Bart Scholte van Mast |
2013-11-05 |
| 8475634 |
Application of HIPIMS to through silicon via metallization in three-dimensional wafer packaging |
Jurgen Weichart |
2013-07-02 |
| 8435389 |
RF substrate bias with high power impulse magnetron sputtering (HIPIMS) |
Jurgen Weichart |
2013-05-07 |
| 8246794 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
Frantisek Balon, Juergen Weichart, Bart Scholte van Mast |
2012-08-21 |
| 7718042 |
Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source |
Eduard Kugler, Walter Haag |
2010-05-18 |
| 7429543 |
Method for the production of a substrate |
Eduard Kugler, Thomas Halter |
2008-09-30 |
| 7138343 |
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber |
Eduard Kugler, Thomas Halter |
2006-11-21 |
| 6860977 |
Method for manufacturing a workpiece using a magnetron sputter source |
Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag +1 more |
2005-03-01 |
| 6682637 |
Magnetron sputter source |
Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag +1 more |
2004-01-27 |
| 5234560 |
Method and device for sputtering of films |
Jindrich Musil |
1993-08-10 |