| 11380530 |
Reactive sputtering with HIPIMS |
Stanislav Kadlec, Mohamed Elghazzali |
2022-07-05 |
| 11143416 |
Radiation heater arrangement |
Rolf Bazlen |
2021-10-12 |
| 10784092 |
Reactive sputtering with HIPIMs |
Stanislav Kadlec, Mohamed Elghazzali |
2020-09-22 |
| 10202682 |
Method of sputtering and sputter system |
Sven Uwe Rieschl |
2019-02-12 |
| 9719177 |
In-situ conditioning for vacuum processing of polymer substrates |
— |
2017-08-01 |
| 9644261 |
Apparatus for sputtering and a method of fabricating a metallization structure |
Mohamed Elghazzali, Stefan Bammesberger, Dennis Minkoley |
2017-05-09 |
| 9624572 |
Method of HIPIMS sputtering and HIPIMS sputter system |
Sven Uwe Rieschl |
2017-04-18 |
| 8852412 |
Magnetron source and method of manufacturing |
— |
2014-10-07 |
| 8691058 |
Apparatus for sputtering and a method of fabricating a metallization structure |
Mohamed Elghazzali, Stefan Bammesberger, Dennis Minkoley |
2014-04-08 |
| 8574409 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
Stanislav Kadlec, Frantisek Balon, Bart Scholte van Mast |
2013-11-05 |
| 8246794 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
Stanislav Kadlec, Frantisek Balon, Bart Scholte van Mast |
2012-08-21 |
| 6814838 |
Vacuum treatment chamber and method for treating surfaces |
— |
2004-11-09 |
| 6432492 |
HF-Plasma coating chamber or PECVD coating chamber, its use and method of plating CDs using the chamber |
— |
2002-08-13 |
| 6312574 |
Target, magnetron source with said target and process for producing said target |
Hans Quaderer |
2001-11-06 |
| 5670065 |
Apparatus for plasma treatment of fine grained materials |
Herrmann Bickmann, Klaus Nauenburg |
1997-09-23 |